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Link-type power base with uneven load suppression for semiconductor manufacturing

A power base with built-in parallel links that suppresses uneven load during ascent, enhancing stability and maintainability to support high-precision transport in semiconductor manufacturing.

In the semiconductor manufacturing industry, extremely high precision and stability are required when handling fine components and wafers. Even slight tilts or vibrations can affect product quality, making positioning accuracy during transfer and elevation crucial. Our "Link-type Power Base" incorporates a parallel link mechanism, allowing for vertical elevation while keeping the tabletop level, regardless of where the load is applied (uneven load). This helps to suppress positional shifts and tilts during precise transport operations, achieving stable operation. 【Usage Scenarios】 - Transfer of wafers and substrates in clean rooms - Automatic transport lines for precision components - Workpiece setup for inspection equipment - Supply of fine components on assembly lines 【Benefits of Implementation】 - Improved positioning accuracy during transfer and elevation - Contributes to increased product yield - Stable operation with minimal lateral movement - Easy integration into automated lines

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  • Suppression-type power base

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